Produzione Scientifica
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Filters: Keyword is Ultraviolet radiation and Author is Cingolani, R. [Clear All Filters]
Polymer to polymer to polymer pattern transfer: Multiple molding for 100 nm scale lithography,
, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Volume 24, Number 2, p.807-812, (2006)